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Research on Micro Accelerometer Array

[+] Author Affiliations
Jijun Xiong, Haiyang Mao, Wendong Zhang, Dong Xu, Tao Guo

North University of China, Taiyuan, China

Paper No. MNC2007-21385, pp. 517-521; 5 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


In a physical process, there might be more than one acceleration to be measured, but a micro accelerometer of a certain testing range can hardly satisfy the measurement requirement. In this paper, a micro accelerometer array with four testing ranges, namely, 0∼100g, 0∼500g, 0∼1,000g and 0∼2,000g, is designed and fabricated. In addition to the design and fabrication process, the protection for the array elements on the condition of overload is described in detail. From the static and dynamic measurement results, it is known that the array has linearity smaller than 2.5%, what’s more, it has quite good frequency response characteristics. The experimental results demonstrate that the array can be used for the measurement of a physical process with multi-acceleration.

Copyright © 2007 by ASME
Topics: Accelerometers



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