Full Content is available to subscribers

Subscribe/Learn More  >

Testing the MEMS Device’s Internal Structure Topography Based on Transmission and Interference Technique

[+] Author Affiliations
Chenyang Xue, Fanhua Kong, Lina Zheng, Wendong Zhang, Jijun Xiong, Binzhen Zhang

North University of China, Taiyuan, Shanxi, China

Paper No. MNC2007-21281, pp. 481-484; 4 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


Based on the principle of white light interference with the Micro System Analyzer ( MSA400 ), the sample of the comb bonded silicon with glass from the Peking University is investigated. In the experiment, the light can transmit through the glass and interfere. Through analyzing the changes of the interference stripes and using the method of envelope to deal with the result, the internal structure of the MEMS can be shown and its geometry dimension and 3D topography can be measured with the testing exposure time 1/250s and 1/300s respectively. From the analyses, the depth of the groove constituted by the combs of the resonator is 84.43um, the width 10um and the depth-to-width ratio 8:1.

Copyright © 2007 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In