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An Orthogonal-Beam Tunnel-Effect MEMS Gyroscope

[+] Author Affiliations
Jun Liu

North University of China, Taiyuan, Shanxi, China; University of California at Berkeley, Berkeley, CA

Yuanyuan Luo, Jingmin Li, YunBo Shi

North University of China, Taiyuan, Shanxi, China

Fai Ma

University of California at Berkeley, Berkeley, CA

Paper No. MNC2007-21270, pp. 465-468; 4 pages
doi:10.1115/MNC2007-21270
From:
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME

abstract

Tunnel-effect MEMS gyroscopes have broad applications in astronautics because they have high sensitivity, low measurement ranges, and small volumes. This paper describes the design of a novel orthogonal-beam gyroscope based on the principle of tunnel effect. The mathematical model of this class of gyroscopes is set up and the associated performance is obtained with ANSYS simulation software. Related MEMS technology for the construction of these orthogonal-beam tunnel-effect gyroscopes is also described.

Copyright © 2007 by ASME

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