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Micro/Nano Piezoelectric Composites for Advanced M/NEMS

[+] Author Affiliations
Xiaoning Jiang, Kevin Snook, Wesley Hackenberger

TRS Technologies, Inc., State College, PA

Jian R. Yuan

Boston Scientific, Fremont, CA

An Cheng

Pennsylvania State University, University Park, PA

Paper No. MNC2007-21181, pp. 415-420; 6 pages
doi:10.1115/MNC2007-21181
From:
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME

abstract

In this paper piezoelectric composites are presented for advanced micro and nano electromechanical devices. The properties of piezoelectric composites (1-3 and 2-2 connectivity) were analyzed and a micromachining process for bulk piezo materials deep etching was developed for piezoelectric composites fabrication. As an example, micromachined piezoelectric composites with center frequency of 20–50 MHz were prototyped. The micro-piezoelectric composites were characterized showing unprecedented properties for high frequency ultrasound imaging and M/NEMS applications.

Copyright © 2007 by ASME

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