0

Full Content is available to subscribers

Subscribe/Learn More  >

Research and Fabrication on Eddy Current Sensor Based on UV-LIGA

[+] Author Affiliations
Xiao-Hu Zheng

Huaiyin Institute of Technology, Huaian, China; Nanjing University of Aeronautics and Astronautics, Nanjing, China

Paper No. MNC2007-21067, pp. 281-284; 4 pages
doi:10.1115/MNC2007-21067
From:
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME

abstract

An analytical model of an eddy current sensor designed for noncontact distance measurement was presented. The device consists of two planar coil (driver coil and pickup coil) stacked on the magnetic core. The planar coil fabricated by UV-LIGA technology with SU8 photoresist was illustrated, and the permalloy magnetic core electroforming process was presented also. Tested with 10–50KHz sine signal, the output voltage on the sensing coil rearched 30mv with an stainless target placed at a distance of 10μm, and the experimental showed a linear relation between the distance and output voltage within 50μm distance. The whole size of the device was: Φ5mm × 1.5 mm. The results demonstrated that the device could nondestructive evaluate the distance and be easily integrated on chip.

Copyright © 2007 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In