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Mechanical-Electrostatic Distortion Analyze and Simulation for MEMS Line Vibration Gyroscope

[+] Author Affiliations
Feng Sun, Qiufen Guo, Yuansheng Ge, Longhua Ma

Harbin Engineering University, Harbin, Heilongjiang, China

Paper No. MNC2007-21018, pp. 219-222; 4 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


MEMS line vibration gyroscope is always drove by electrostatic. When the configuration of the MEMS line vibration gyroscope is symmetry, its mass is vibrated in line at one direction (it is x direction here) and balanced in force at the other direction that vertical to x direction (it is y direction here) in horizontal. But when the configuration of the MEMS line vibration gyroscope is not asymmetry, the electrostatic that putted on the mass at y direction is destroyed. At this condition, one is that the mass is vibrated in line at y direction and produced zero signals; one is that the combs are distorted at y direction because of the destroyed of the balance of the electrostatic at y direction. This paper analyzed the second condition. The model of the distortion was built because the configuration is asymmetry. And it was simulated in Matlab. At the same time, it was analyzed by ANSYS according to the method of the Limited Element. And we got the electrostatic distributing fig and the distortion fig by using ANSYS. Through the compare of two methods, we know that the built model is correct whether or not.

Copyright © 2007 by ASME



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