Full Content is available to subscribers

Subscribe/Learn More  >

Several Key Technologies to Improve Silicon Microgyro Performance

[+] Author Affiliations
Dunzhu Xia, Bailing Zhou, Shourong Wang

Southeast University, Nanjing, China

Paper No. MNC2007-21543, pp. 157-160; 4 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


Silicon micromechanical gyroscope is an extraordinarily important micro inertial sensor, which has characteristics of little size, low cost and batch integrated production with huge market. But it now belongs to low or middle level precision angular rate sensor, so it is becoming a key problem to update this sensitivity to high level. This paper presents several key technologies to improve silicon microgyro performance from the view of micro-electro-mechanical working principle and minor signal detection of microgyro. The simulation and circuit design are well done, which results testify that these improved technologies have certain academic and practical value to update present low or middle level precision angular rate sensor.

Copyright © 2007 by ASME
Topics: Silicon



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In