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Several Key Technologies to Improve Silicon Microgyro Performance

[+] Author Affiliations
Dunzhu Xia, Bailing Zhou, Shourong Wang

Southeast University, Nanjing, China

Paper No. MNC2007-21543, pp. 157-160; 4 pages
doi:10.1115/MNC2007-21543
From:
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME

abstract

Silicon micromechanical gyroscope is an extraordinarily important micro inertial sensor, which has characteristics of little size, low cost and batch integrated production with huge market. But it now belongs to low or middle level precision angular rate sensor, so it is becoming a key problem to update this sensitivity to high level. This paper presents several key technologies to improve silicon microgyro performance from the view of micro-electro-mechanical working principle and minor signal detection of microgyro. The simulation and circuit design are well done, which results testify that these improved technologies have certain academic and practical value to update present low or middle level precision angular rate sensor.

Copyright © 2007 by ASME
Topics: Silicon

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