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Nonlinear Vibration of Electrostatically Actuated MEMS Resonators Under Parametric and External Excitations

[+] Author Affiliations
Wen-Ming Zhang, Guang Meng, Di Chen

Shanghai Jiao Tong University, Shanghai, China

Paper No. MNC2007-21520, pp. 149-155; 7 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


Electrostatically actuated resonant MEMS (Micro-electromechanical Systems) have gotten significant attention due to their geometric simplicity and broad applicability. In this paper, analyses and simulations for the dynamics of electrostatically actuated MEM structures under parametric and external excitations are presented. The presented model and methodology enable simulation of the dynamics of the electrostatic MEM structure undergoing small motions. The numerical results showing the effects of varying the applied voltages and the squeeze film damping on the resonant frequencies and nonlinear dynamic characteristics are given in detail. Resonant frequency and peak amplitude are examined for variation of the dynamical parameters involved. It is demonstrated that the system goes through a complex nonlinear oscillation as the system parameters change. This investigation provides an understanding of the nonlinear dynamic characteristics of electrostatically actuated resonant MEMS.

Copyright © 2007 by ASME



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