Full Content is available to subscribers

Subscribe/Learn More  >

A Micromachined Integrated Sensor for Pressure, Temperature and Humidity

[+] Author Affiliations
Yulong Zhao, Zhuangde Jiang, Libo Zhao, Jingbo Xu

Xi’an Jiaotong University, Xi’an, China

Paper No. MNC2007-21514, pp. 137-142; 6 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


In this paper, the technology of a micromachined sensors chip, on which an absolute pressure sensor, a temperature sensor and a humidity sensor are integrated, is described. The absolute pressure sensor uses a bulk micromachined diaphragm structure with piezoresistors. For temperature sensing, a silicon temperature sensor is fabricated based on the spreading resistance principle. And the humidity sensor is a capacitive humidity one with polyimide film and interdigitated capacitance electrodes. The anisotropy of (100) n-type silicon is used to design and fabricate the integrated sensor chip. The different piezoresistive orientations are used for the absolute pressure sensor and the temperature sensor to reduce the interference between each other. The humidity sensor is made up of 49 pairs of aluminum electrodes and one kind of polyimide. This polyimide material consists of 65% polyvinyl alcohol and 35% carbon black. The fabrication and package processes are introduced. And the sensor chip size is 5mm × 5mm. Each sensor in the integrated chip shows good sensor characteristics except for humidity sensor. However, the linearity and hysteresis of humidity sensor can be improved by selecting the proper polymer materials and structure.

Copyright © 2007 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In