Full Content is available to subscribers

Subscribe/Learn More  >

Characterization of a Micropump Actuated by Ternary TiNiCu Shape Memory Thin Films

[+] Author Affiliations
Huijun Zhang, Chengjun Qiu

Heilongjiang University, Harbin, China

Paper No. MNC2007-21321, pp. 123-126; 4 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


Thin film SMAs have the potential to became a primary actuating mechanism for micropumps. In this study, a micropump driven by TiNiCu shape memory thin film is designed and fabricated. The micropump is composed of a TiNiCu/Si bimorph driving membrane, a pump chamber and two inlet and outlet check valves. The thickness, surface morphology and phase transformation property of TiNiCu film have been characterized by scanning electron microscope (SEM), atomic force microscopy (AFM), differential scanning calorimeters (DSC). Driving capacity of TiNiCu/Si biomorphic driving membrane has been investigated. The film surface shows a smooth and featureless morphology without any cracks, and the hysteresis width ΔT of TiNiCu film is about 10 °C. By using the recoverable force of TiNiCu thin film, the actuation diaphragm realizes reciprocating motion effectively. Experimental results show that the micropump driving by TiNiCu film has good performance, such as high working frequency, stable driving capacity, and long fatigue life time.

Copyright © 2007 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In