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Design and Simulation of Quartz Tuning Fork Temperature Sensor

[+] Author Affiliations
Jun Xu, Bo You, Xin Li

Harbin University of Science and Technology, Harbin, China

Paper No. MNC2007-21307, pp. 115-121; 7 pages
  • 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems
  • First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B
  • Sanya, Hainan, China, January 10–13, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4265-7 | eISBN: 0-7918-3794-7
  • Copyright © 2007 by ASME


In order to optimize the design of quartz tuning fork temperature sensor, finite element method (FEM) is applied to model optimum tuning fork geometry, tine tip and tine surface electrode shape and thickness with a resonance frequency close to 32 kHz and a series resistance value of 40 kΩ as design targets. This type of sensor designed with a new ZYtw-cut is proved that working at flexural vibration mode was better than at the others modes. Precise temperature versus frequency analyses of resonators have been carried out and Least Mean Squared (LMS) curve fit algorithm is applied to compute the temperature values quantitatively. The results obtained from the experimental investigations show the method which synthesizes many factors to design quartz tuning-fork temperature sensor. Using ZYtw-cut can bring the temperature coefficient up to 70ppm/(degree C) and make power consumption lower. The temperature sensor based on quartz tuning-fork thermo-sensitive resonator is mounted in a standard holder for use from −30 degree C to 160 degree C with an accuracy of 0.05 degree C and a high resolution of 0.001 degree C. It is proved that it is possible to construct a miniature quartz tuning-fork temperature sensor with high sensitivity and small non-linearity.

Copyright © 2007 by ASME



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