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MEMS Gyro Modal Analysis and Design Tool

[+] Author Affiliations
J. Albert Chiou

Motorola, Inc., Deer Park, IL

Paper No. IMECE2003-41834, pp. 95-100; 6 pages
  • ASME 2003 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems and Photonic Design, and Nanotechnology
  • Washington, DC, USA, November 15–21, 2003
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-3714-9 | eISBN: 0-7918-4663-6, 0-7918-4664-4, 0-7918-4665-2
  • Copyright © 2003 by ASME


A gyroscope is used to measure angular rates for may applications such as automotive applications, navigation applications, military applications, consumer electronics applications, and robotics applications, etc. For our specific automotive applications, the gyro is used to sense the yaw, roll, and pitch angular rates for ride stabilization and rollover detection. The tuning-fork gyro device used is a double gimbaled vibratory gyroscope supported by flexures with the vibrating mechanical element made of silicon. In order to drive the gyro device with a low voltage and a high quality factor (Q), the sensing element is sealed in a high-vacuumed package. The operational resonant frequencies are very critical to the ASIC control circuit. The purpose of this study is to perform modal analyses, validate the simulation results with testing data, and provide a design tool for quick gyro element resonant frequency predictions in order to reduce design and product development cycle time. The process tolerance and design limit can also be quickly evaluated before the wafer is built.

Copyright © 2003 by ASME



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