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Micro-Refrigerator Fabricated on Silicon Wafer

[+] Author Affiliations
Y. Takata, K. Sugahara, T. Tachikawa, S. Moroe, H. Kubota, M. Kohno, K. Takahashi

Kyushu University, Fukuoka, Japan

T. Koshimizu

Kitakyushu National College of Technology, Kitakyushu, Japan

Paper No. ICNMM2007-30108, pp. 749-753; 5 pages
  • ASME 2007 5th International Conference on Nanochannels, Microchannels, and Minichannels
  • ASME 5th International Conference on Nanochannels, Microchannels, and Minichannels
  • Puebla, Mexico, June 18–20, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4272-X | eISBN: 0-7918-3800-5
  • Copyright © 2007 by ASME


A prototype Joule-Thomson micro-cooler was fabricated on silicon wafer by making use of photofabrication. The micro-cooler uses ethylene as a refrigerant and it consists mainly of heat exchanger and evaporator. The cooling power of 20mW at evaporator temperature of 272K was attained at the inlet and outlet gas pressures of 2.5MPa and 0.1MPa, respectively. To understand the low cooling performance, numerical analysis of heat exchanger has been done and the effects of mass flow rate and thermal conductivity of solid on temperature profiles and effectiveness were examined. It was found that the flow rate of present experiment is too large and the decrease in flow rate gives better temperature effectiveness of heat exchanger. It was also found that the low thermal conductivity of solid improves the performance of heat exchanger.

Copyright © 2007 by ASME



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