0

Full Content is available to subscribers

Subscribe/Learn More  >

Improvements of Roughness Control in Micromachining of Silicon Microchannels

[+] Author Affiliations
D. Resnik, D. Vrtačnik, U. Aljančič, M. Možek, S. Penič, S. Amon

University of Ljubljana, Ljubljana, Slovenia

Paper No. ICNMM2007-30217, pp. 133-140; 8 pages
doi:10.1115/ICNMM2007-30217
From:
  • ASME 2007 5th International Conference on Nanochannels, Microchannels, and Minichannels
  • ASME 5th International Conference on Nanochannels, Microchannels, and Minichannels
  • Puebla, Mexico, June 18–20, 2007
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4272-X | eISBN: 0-7918-3800-5
  • Copyright © 2007 by ASME

abstract

Investigation of wet anisotropic etching of silicon microchannels on (100) silicon is presented with the emphasis to simultaneously fabricate bifurcated silicon channels in <100> and <110> directions. Silicon crystal planes that are playing major role of microchannels sidewalls are characterized for their roughness and etch rates. Beside the standardly smooth {111} crystal planes, microroughness of {110} sidewalls is of particular interest. It is shown that by implementing TMAH-Triton etchant, the roughness of {110} sidewalls was significantly improved over the standard KOH-IPA or TMAH-IPA etching system without affecting the neighboring crystal plane sidewalls. Agitation of the etching solution is found to have significant influence on both, the etch rate and surface roughness. Optimal etching conditions were determined to obtain smooth microchannel sidewalls in two major directions. Furthermore, reduced convex corner underetching was obtained compared to other etching system. Two viable solutions for the connecting through holes or vias are presented by using single or double mask layer photolithography prior to performing the etching step.

Copyright © 2007 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In