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Components, Building Blocks, and Demonstrations of Spherical Mechanisms in Microelectromechanical Systems

[+] Author Affiliations
Craig P. Lusk

University of South Florida, Tampa, FL

Larry L. Howell

Brigham Young University, Provo, UT

Paper No. DETC2005-84672, pp. 529-535; 7 pages
doi:10.1115/DETC2005-84672
From:
  • ASME 2005 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 7: 29th Mechanisms and Robotics Conference, Parts A and B
  • Long Beach, California, USA, September 24–28, 2005
  • Conference Sponsors: Design Engineering Division and Computers and Information in Engineering Division
  • ISBN: 0-7918-4744-6 | eISBN: 0-7918-3766-1
  • Copyright © 2005 by ASME

abstract

Microelectromechanical systems (MEMS) are usually fabricated using planar processing methods which complicates the design of devices capable of complex motions. For applications that need a micro mechanism that rotates out of the plane of fabrication with an in-plane rotational input, or that rotates spatially about a point, spherical kinematics may represent an appropriate solution. This paper describes the design of spherical mechanisms for MEMS including the design of joints and links, and what may be the first demonstration of two spherical micro mechanism building blocks: the spherical four-bar micromechanism and the spherical slider-crank micromechanism. Two other micromechanisms are demonstrated to illustrate how the building block devices may be used to create more complex devices.

Copyright © 2005 by ASME

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