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Topology Optimization of Micromachined Structures With Surface Micromachining Manufacturing Constraints

[+] Author Affiliations
Aravind Alwan, G. K. Ananthasuresh

Indian Institute of Science, Bangalore, India

Paper No. DETC2006-99341, pp. 491-498; 8 pages
  • ASME 2006 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 1: 32nd Design Automation Conference, Parts A and B
  • Philadelphia, Pennsylvania, USA, September 10–13, 2006
  • Conference Sponsors: Design Engineering Division and Computers and Information in Engineering Division
  • ISBN: 0-7918-4255-X | eISBN: 0-7918-3784-X
  • Copyright © 2006 by ASME


Topology optimization methods have been shown to have extensive application in the design of microsystems. However, their utility in practical situations is restricted to predominantly planar configurations due to the limitations of most microfabrication techniques in realizing structures with arbitrary topologies in the direction perpendicular to the substrate. This study addresses the problem of synthesizing optimal topologies in the out-of-plane direction while obeying the constraints imposed by surface micromachining. A new formulation that achieves this by defining a design space that implicitly obeys the manufacturing constraints with a continuous design parameterization is presented in this paper. This is in contrast to including manufacturing cost in the objective function or constraints. The resulting solutions of the new formulation obtained with gradient-based optimization directly provide the photolithographic mask layouts. Two examples that illustrate the approach for the case of stiff structures are included.

Copyright © 2006 by ASME



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