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Nonlinear Identification of a Capacitive Dual-Backplate MEMS Microphone

[+] Author Affiliations
Jian Liu, David T. Martin, Karthik Kadirvel, Toshikazu Nishida, Mark Sheplak, Brian P. Mann

University of Florida, Gainesville, FL

Paper No. DETC2005-84591, pp. 441-451; 11 pages
  • ASME 2005 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 1: 20th Biennial Conference on Mechanical Vibration and Noise, Parts A, B, and C
  • Long Beach, California, USA, September 24–28, 2005
  • Conference Sponsors: Design Engineering Division and Computers and Information in Engineering Division
  • ISBN: 0-7918-4738-1 | eISBN: 0-7918-3766-1
  • Copyright © 2005 by ASME


This paper presents the nonlinear system identification of model parameters for a capacitive dual-backplate MEMS microphone. System parameters of the microphone are developed by lumped element modeling (LEM) and a governing nonlinear equation is thereafter obtained with coupled mechanical and electrostatic nonlinearities. The approximate solution for a general damped second order system with both quadratic and cubic nonlinearities and a non-zero external step loading is explored by the multiple time scales method. Then nonlinear finite element analysis (FEA) is performed to verify the accuracy of the lumped stiffnesses of the diaphragm. The microphone is characterized and nonlinear least-squares technique is implemented to identify system parameters from experimental data. Finally uncertainty analysis is performed. The experimentally identified natural frequency and nonlinear stiffness parameter fall into their theoretical ranges for a 95% confidence level respectively.

Copyright © 2005 by ASME



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