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Investigation of the Natural Convection Boundary Condition in Microfabricated Structures

[+] Author Affiliations
Xuejiao Hu, Ankur Jain, Kenneth E. Goodson

Stanford University, Stanford, CA

Paper No. HT2005-72698, pp. 641-644; 4 pages
doi:10.1115/HT2005-72698
From:
  • ASME 2005 Summer Heat Transfer Conference collocated with the ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems
  • Heat Transfer: Volume 1
  • San Francisco, California, USA, July 17–22, 2005
  • Conference Sponsors: Heat Transfer Division and Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4731-4 | eISBN: 0-7918-3762-9
  • Copyright © 2005 by ASME

abstract

Heat loss through surrounding air has important thermal effect on microfabricated structures. This effect is generally modeled as a natural convection boundary condition. However, how to determine the convective coefficient (h) at microscales is a debate. In this paper, a micro heater is fabricated on a suspended thin film membrane. The natural convection is investigated using the 3-omega measurements and complex analytical modeling. It is found that h seems larger than that at larger scales; however, it is also proved that the increased h is actually contributed by heat conduction instead of heat convection. A method of determining the phenomenal h that can be used for microfabricated structures is proposed by using the heat conduction shape factor.

Copyright © 2005 by ASME

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