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A New Inchworm Mechanism With Hydrauilic Booster

[+] Author Affiliations
Sara Behjat, Amir Khajepour, Kirsten A. Morris

University of Waterloo, Waterloo, ON, Canada

Paper No. DETC2002/MECH-34367, pp. 1369-1374; 6 pages
  • ASME 2002 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 5: 27th Biennial Mechanisms and Robotics Conference
  • Montreal, Quebec, Canada, September 29–October 2, 2002
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 0-7918-3625-3 | eISBN: 0-7918-3603-7
  • Copyright © 2002 by ASME


Micro- and nanotechnology have been the cornerstones of many advanced products in recent years. Commercialization and mass production of these products require robots and positioning devices with nanometer precision and reasonable operational speed. High-speed nano-positioning devices can be used to increase productivity and reduce manufacturing cost in many areas including: optoelectronic fiber and lens assembly and positioning, biological cell manipulators, micro-machining, semiconductor manufacturing, and calibration of measurement instruments. In this paper, a new high-speed inchworm linear motor is introduced which employs a hydraulic booster to increase its operational speed without sacrificing the accuracy.

Copyright © 2002 by ASME



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