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Design Consideration, Process and Mechanical Modeling, and Tolerance Analysis of MEMS-Based Mechanical System-on-a-Chip (SOAC) for Nanomanufacturing

[+] Author Affiliations
Chad B. O’Neil, Ajay P. Malshe, Kumar Virwani, William F. Schmidt

University of Arkansas, Fayetteville, AR

Paper No. IMECE2002-39381, pp. 529-534; 6 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-3648-7 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


In this paper the authors describe the design considerations including force and tolerance analysis and mechanism and tip design, for a novel, dynamic scanning probe microscopy tip directly insertable into today’s existing atomic force microscopy tools. This tool is the first of its kind and is a major step in the field of nanomanufacturing enabling the use of nanomechanical machining operations for nanostructure top-down manufacturing. The application of this device is the nanomechanical drilling and milling of III-V semiconductor substrates for various applications such as nanovias for electrical interconnection of next generation electronic and photonic applications, as well as reservoirs and capillaries for nano-fluidics. Results to date indicate that device performance parameters allow a normal drilling force of 25 μN, tangential drilling force of 35 μN, maximum rotational speed of 100,000 rpm, and minimum machined feature size of less than 200 nm. This device is currently being fabricated at Sandia National Laboratories, SUMMIT MEMS foundry and being packaged at the University of Arkansas, Fayetteville High Density Electronics Center (HiDEC).

Copyright © 2002 by ASME



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