0

Full Content is available to subscribers

Subscribe/Learn More  >

Simulations and Statistical Analyses of the Alignment of Patterned Optical Waveguides

[+] Author Affiliations
Min-Yi Shih, Matt Nielsen, Ernie Balch, Leonard Douglas

General Electric Global Research Center, Niskayuna, NY

Paper No. IMECE2002-39207, pp. 459-463; 5 pages
doi:10.1115/IMECE2002-39207
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-3648-7 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

In this paper we investigate the tolerances required to achieve high transmission efficiencies given two planar waveguides with misalignments in both offset and overlap. More specifically, simulations of two types of waveguides, embedded and deep-ridge, with defects created during a multi-exposure lithographic process are presented along with statistical analyses results. Average efficiencies as high as 99% can be achieved with both waveguides having misalignment deviations in position as great as 0.3 μm. Overlap misalignment in the regime we explored was found to be much less critical for the planar waveguide coupling.

Copyright © 2002 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In