0

Full Content is available to subscribers

Subscribe/Learn More  >

Failure Simulation of Angled Polycrystalline Lines Covered With Passivation Layer

[+] Author Affiliations
Masataka Hasegawa, Masumi Saka, Hiroyuki Abé

Tohoku University, Sendai, Japan

Kazuhiko Sasagawa

Hirosaki University, Hirosaki, Japan

Paper No. IMECE2002-39677, pp. 337-343; 7 pages
doi:10.1115/IMECE2002-39677
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-3648-7 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

The atomic flux divergence due to electromigration in a passivated polycrystalline line, AFD* gen , has been formulated adding the effect of a passivation on electromigration damage to the governing parameter for electromigration damage in an unpassivated polycrystalline line, AFDgen . The parameter, AFD* gen , has been identified as a governing parameter for electromigration damage in the passivated polycrystalline line by experimental verification process. Recently, a prediction method for electromigration failure in the passivated polycrystalline line was proposed using AFD* gen , and the usefulness of the method was verified through experiment. Both the lifetime and the failure location in the passivated polycrystalline line can be predicted by means of numerical simulation of the failure process covering the building up of atomic density distribution, void initiation, void growth and ultimately—line failure. In this study, AFD* gen -based method for predicting electromigration failure is applied angled polycrystalline lines covered with passivation. There are few works on prediction of failure in the angled lines, though such lines are widely used in IC (integrated circuit) products. The failures are simulated when the corner position and its angle are changed. The dependency of lifetime and failure location on line shape is investigated.

Copyright © 2002 by ASME
Topics: Simulation , Failure

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In