0

Full Content is available to subscribers

Subscribe/Learn More  >

Thermal Warpage and Pressure Nonlinearity Analyses for Monolithic Piezoresistive Sensing Elements

[+] Author Affiliations
J. Albert Chiou

Motorola, Inc., Northbrook, IL

Paper No. IMECE2002-39264, pp. 9-14; 6 pages
doi:10.1115/IMECE2002-39264
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-3648-7 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

This paper presents thermal stress simulation results for a monolithic pressure sensing element design. The basic design concept is to fabricate a standard submicron CMOS process with appropriate modifications to integrate on-chip signal conditioning circuits with piezoresistive sensing elements with anisotropic-etched diaphragms. The stress simulation is used to estimate the electromechanical behavior of a new monolithic sensing element design. The major tasks are to predict ripple deformation of the silicon diaphragm due to thermal residual stresses from multiple passivation layers, find an optimal placement location for the piezoresistive transducer with the highest stress sensitivity or largest full scale span (FSS), and estimate the pressure nonlinearity.

Copyright © 2002 by ASME
Topics: Pressure , Warping

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In