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Evaluating Micromechanical Properties at Surfaces Using Nanoindentation With Finite-Element Modeling

[+] Author Affiliations
J. A. Knapp, D. M. Follstaedt, S. M. Myers

Sandia National Laboratories, Albuquerque, NM

Paper No. IMECE2002-32391, pp. 567-572; 6 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


Detailed finite-element modeling of nanoindentation data is used to obtain accurate mechanical properties of very thin films or surface-modified layers independently of the properties of the underlying substrates. These procedures accurately deduce the yield strength, elastic modulus, and layer hardness, and greatly increase the usefulness of indentation testing with very thin surface layers. Moreover, extraction of the effective Young’s modulus in the near surface region should enable mechanical damage studies on a small scale. This paper presents a brief overview of the procedures involved and illustrates them with He-implanted Ni.

Copyright © 2002 by ASME



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