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Design to Succeed: Integrated MEMS Development

[+] Author Affiliations
Nora Finch

Corning IntelliSense Corporation, Wilmington, MA

Paper No. IMECE2002-39260, pp. 555-558; 4 pages
doi:10.1115/IMECE2002-39260
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

Designers of Micro-Electro-Mechanical Systems (MEMS) face many challenges by being forced to meet product specifications within the limitations of processing and thin-film material parameters. To create a successful MEMS product, there must be collaboration between experts in the target industry and MEMS experts in processing, materials, and other relevant technologies. The use of an integrated CAD for MEMS™ tool by all parties involved can greatly reduce the number of design and fabrication iterations required to successfully commercialize the product. Leveraging Corning IntelliSense’s over ten years of experience in the development of MEMS, IntelliSuite® provides a unified development platform for process development, thin-film material engineering, mask layout, and device and package analysis. Here we will outline a proven strategy for cost-effective, rapid product development.

Copyright © 2002 by ASME

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