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Meeting the MEMS “Design-to-Analysis” Challenge: The SUMMiT® V Design Tool Environment

[+] Author Affiliations
Victor R. Yarberry

Sandia National Laboratories, Albuquerque, NM

Paper No. IMECE2002-39205, pp. 547-553; 7 pages
doi:10.1115/IMECE2002-39205
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

This paper describes the SUMMiT® V Design Tools, a suite of CAD tools that enable a SUMMiT® (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to meet the ‘Design-To-Analysis’ challenge. Sandia has developed a MEMS design tool suite integrated with a commercial 3D mechanical CAD tool, AutoCAD® . Designed for use with the SUMMiT® process, it includes in-house written design tools: a 2D Process Visualizer [2], a fast 3D Visualizer, a detailed 3D Model Generator [3], a finite element mesh generator [4], a library of standard components [5], and a Design Rule Check system [6].

Copyright © 2002 by ASME

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