Full Content is available to subscribers

Subscribe/Learn More  >

Meeting the MEMS “Design-to-Analysis” Challenge: The SUMMiT® V Design Tool Environment

[+] Author Affiliations
Victor R. Yarberry

Sandia National Laboratories, Albuquerque, NM

Paper No. IMECE2002-39205, pp. 547-553; 7 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


This paper describes the SUMMiT® V Design Tools, a suite of CAD tools that enable a SUMMiT® (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to meet the ‘Design-To-Analysis’ challenge. Sandia has developed a MEMS design tool suite integrated with a commercial 3D mechanical CAD tool, AutoCAD® . Designed for use with the SUMMiT® process, it includes in-house written design tools: a 2D Process Visualizer [2], a fast 3D Visualizer, a detailed 3D Model Generator [3], a finite element mesh generator [4], a library of standard components [5], and a Design Rule Check system [6].

Copyright © 2002 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In