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The Design Environment for MEMS

[+] Author Affiliations
Stephen F. Bart

Coventor, Inc., Cambridge, MA

Paper No. IMECE2002-32725, pp. 541-545; 5 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


Microsystems Technology (MST) or Microelectromechanical Systems (MEMS) by their nature as sensors and actuators are inherently coupled systems that are sensitive to their environment. Therefore, simulating and understanding these influences on the MEMS device’s performance is critical to a successful design. Such simulations require a complex design environment that allows model construction, detailed physical simulation, reduced-order system simulation, and verification. Since these devices almost always interact with IC circuitry, the system level models must, in general, be intergratible with well-established VLSI circuit simulation environments. Also, MEMS are particularly sensitive to package interactions and thus the ability to simulate coupled package interactions are required. In addition to these technical requirements, a MEMS CAD environment must meet several market requirements in order to grow and evolve. This paper examines these requirements and the current state of CAD for MEMS.

Copyright © 2002 by ASME



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