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MEMS Foundry for High Volume Manufacturing and Product Reliance

[+] Author Affiliations
David A. Koester, James P. Baumhover

JDS Uniphase, Research Triangle Park, NC

Paper No. IMECE2002-39355, pp. 535-540; 6 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


The establishment of standard processes has become increasingly important in the growth of MEMS technology. Standard processes enable developers to leverage stable process platforms without the risk, time and costs associated with extensive process development. JDS Uniphase has established multi-user programs in three different process technologies—polysilicon, SOI and metal—that provide easy, cost-effective vehicles for early stage development. These processes also provide low-risk pathways to manufacturing in high volume. This paper discusses these processes and provides additional background on the importance of a quality system in the management of foundry product development. Product reliability testing is discussed in the context of a customer/foundry model.

Copyright © 2002 by ASME



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