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The Customer-Foundry Relationship in MEMS Manufacturing

[+] Author Affiliations
John S. Foster, Monteith G. Heaton

Innovative Micro Technology

Paper No. IMECE2002-32747, pp. 523-527; 5 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


MEMS industry has seen mixed success over the last decade or so. Today, there are only a limited number of MEMS products available on the market, notably airbag accelerometers, desktop inkjet print heads and pressure sensors for automotive and biomedical applications. Despite major infusion of funds in other applications, such as optical telecommunications, RF, and biomedical/microfluidics, these efforts have failed to produce working MEMS in high volumes. The net result is that MEMS have not yet lived up to their anticipated promise.

Copyright © 2002 by ASME



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