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Aspheric Micro-Lens-Array Fabricated by Excimer Laser Dragging

[+] Author Affiliations
Gou-Jen Wang, Wei-Leun Cheng

National Chung-Hsing University, Taiwan, R. O. C.

Jauh-Jung Yang, Cheng-Tang Pan

Industrial Technology Research Institute, Taiwan, R. O. C.

Paper No. IMECE2002-39306, pp. 463-467; 5 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


This article investigates the fabrication processes of the three-dimensional microstructure by using excimer laser dragging method. To systematic control the dimensions and shape of the ablation depth and reduce the time-consuming parameter tuning labors, b both the linear regression and the nonlinear neural network approaches are employed by adapting the preliminarily experimental data to model the fabrication process. Further experiments are then conducted to verify the established fabrication models. Finally, the relationship between the controlled parameters such as height of the mask, moving speed of the mask, energy of the laser pulse and the ablation depth of the work piece are elaborately investigated.

Copyright © 2002 by ASME



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