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Fabrication of NdFeB Thin Film and Its Application in MEMS

[+] Author Affiliations
Pan Zheng, Mohammad Kilani, Yousef S. Haik

Florida State University, Tallahassee, FL

Ching-Jen Chen

Florida A&M University, Tallahassee, FL

Paper No. IMECE2002-33401, pp. 401-404; 4 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.

Copyright © 2002 by ASME



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