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Heat Deformation in Optical Measurement of MEMS

[+] Author Affiliations
Yasuhiko Arai, Tatsuya Nakagami, Seiji Aoyagi, Atsunobu Mori

Kansai University, Osaka, Japan

Shunsuke Yokozeki

Kyushu Institute of Technology

Paper No. IMECE2002-33399, pp. 389-393; 5 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


The present measurement technology in MEMS fields is not enough to produce a high performance MEMS. The measurement without any transfer of energy is required for the measurement of MEMS. In this measurement, a phenomenon of the heat deformation by the laser beam used in the measurement can be observed in the measured object. In the case of the measurement of MEMS that is very small structure, it is meant that a transfer of energy exists in the measurement using a laser beam. The problems of heat deformation in the optical measurement for MEMS are discussed. It is concluded that the analysis that is given a consideration of the structure of MEMS against the heat deformation is desired in the measurement of MEMS.

Copyright © 2002 by ASME



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