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Maglev Linear Actuator for Nanopositioning

[+] Author Affiliations
Won-jong Kim, Himanshu Maheshwari, Jie Gu

Texas A&M University, College Station, TX

Paper No. IMECE2002-33395, pp. 377-381; 5 pages
doi:10.1115/IMECE2002-33395
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

Manufacture of nanoscale structures and atomic-level manipulation is an emerging technology field in the 21st century [1,2]. This paper presents a novel magnetically levitated instrument capable of six-degrees-of-freedom (6-DOF) motion with a single moving part. The applications, where this generic positioning device can be used, are manufacturing of nanoscale structures, assembly and packaging of microparts, vibration isolation for delicate instrumentation and motion/force feedback in telepresence surgery. The key element of this stage is a linear actuator capable of providing forces in both suspension and translation without contact. The total range of motion for the linear actuator is ±250 μm. In this paper, we present the closed-loop control test results and stochastic noise/disturbance analysis and prediction for the linear actuator.

Copyright © 2002 by ASME

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