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Enhancement of In-Plane Thermal Conductivity of Thin Films via Surface Phonon-Polaritons

[+] Author Affiliations
Dye-Zone A. Chen, Arvind Narayanaswamy, Gang Chen

Massachusetts Institute of Technology

Paper No. IMECE2005-83051, pp. 841-846; 6 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Heat Transfer, Part B
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Heat Transfer Division
  • ISBN: 0-7918-4222-3 | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


We predict theoretically that the effective in-plane thermal conductivity of crystalline and amorphous thin films can be increased by surface phonon-polaritons significantly beyond their intrinsic bulk values. We show that the thermal conductivity due to surface phonon-polaritons increases with decreasing film thickness. In particular, for a 40 nm thick film of amorphous silicon dioxide, we calculate a total thermal conductivity of 4 W m−1 K−1 at 500 K, which is an increase of ~100% over the intrinsic phonon thermal conductivity.

Copyright © 2005 by ASME



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