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A Demonstration of EFAB™ as a Fundamental Shift in the Way Microdevices Are Manufactured

[+] Author Affiliations
John D. Evans, Christopher Bang

MEMGen Corporation, Burbank, CA

Paper No. IMECE2002-33384, pp. 351-354; 4 pages
doi:10.1115/IMECE2002-33384
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

The authors introduce the EFAB™ manufacturing process originally invented at the University of Southern California and currently being commercialized by MEMGen Corporation. They discuss its significant recent evolution as an alternative to conventional microdevice manufacturing technologies, suggest a range of geometries and applications that are enabled by this process, and develop the case that EFAB represents a fundamental shift in the way the microdevices are manufactured.

Copyright © 2002 by ASME

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