Full Content is available to subscribers

Subscribe/Learn More  >

Analysis of a Composite Piezoelectric Circular Plate With Initial Stresses for MEMS

[+] Author Affiliations
Guiqin Wang, Bhavani V. Sankar, Louis N. Cattafesta, Mark Sheplak

University of Florida, Gainesville, FL

Paper No. IMECE2002-39337, pp. 339-346; 8 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


The paper presents a mechanical analysis of the multi-layer circular composite plate For MEMS devices. Each layer of the plate is assumed to have different radius, material properties and initial stresses. Governing equations for the composite plate are derived based on the classical laminated plate theory, and analytical soultions have been developed for static deflection of the initially stressed plate due to transverse pressure loading as well as for a given electric field in the piezoelectric layer. A nonlinear finite elernent analysis of the plate is also performed. The analytical result match the FE results for the range of parameters used in the microphone design. The analytical model will be useful in the design and optimization of MEMS devices containing circular piezoelectric composite plates and diaphragms.

Copyright © 2002 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In