Full Content is available to subscribers

Subscribe/Learn More  >

Thermoelastic Actuation: Solution for Circular Composite Plates With Application in MEMS

[+] Author Affiliations
Venkataraman Chandrasekaran, Mark Sheplak, Louis N. Cattafesta, Bhavani V. Sankar

University of Florida, Gainesville, FL

Paper No. IMECE2002-39328, pp. 327-332; 6 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


This paper presents the dynamic analysis of a thermoelastically actuated circular composite diaphragm, for MEMS applications. The diaphragm is used as an acoustic transmitter, actuated at ultrasonic frequencies via a diffused surface heater at its center. The principle of operation of the thermal actuator is the generation of an oscillating temperature gradient across the diaphragm cross-section due to Joule heating of the diffused heater, creating a thermal moment that results in out-of-plane bending of the diaphragm. The mechanical analysis of the diaphragm, modeled as a composite plate, is based on the classical laminated plate theory. The time harmonic heat conduction resulting from the Joule heating of the diffused surface heater, modeled as a surface heat flux input, is analyzed using the Fourier heat conduction model. Analytical expressions have been obtained for the temperature distribution, and the resulting thermal moment, and plate deflection.

Copyright © 2002 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In