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Thermoelastic Actuation: Solution for Circular Composite Plates With Application in MEMS

[+] Author Affiliations
Venkataraman Chandrasekaran, Mark Sheplak, Louis N. Cattafesta, Bhavani V. Sankar

University of Florida, Gainesville, FL

Paper No. IMECE2002-39328, pp. 327-332; 6 pages
doi:10.1115/IMECE2002-39328
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

This paper presents the dynamic analysis of a thermoelastically actuated circular composite diaphragm, for MEMS applications. The diaphragm is used as an acoustic transmitter, actuated at ultrasonic frequencies via a diffused surface heater at its center. The principle of operation of the thermal actuator is the generation of an oscillating temperature gradient across the diaphragm cross-section due to Joule heating of the diffused heater, creating a thermal moment that results in out-of-plane bending of the diaphragm. The mechanical analysis of the diaphragm, modeled as a composite plate, is based on the classical laminated plate theory. The time harmonic heat conduction resulting from the Joule heating of the diffused surface heater, modeled as a surface heat flux input, is analyzed using the Fourier heat conduction model. Analytical expressions have been obtained for the temperature distribution, and the resulting thermal moment, and plate deflection.

Copyright © 2002 by ASME

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