0

Full Content is available to subscribers

Subscribe/Learn More  >

Electromagnetic Squeezing Microactuators Using Laterally-Driven Flexible Copper Strip

[+] Author Affiliations
Tae Goo Kang, Young-Ho Cho

Korea Advanced Institute of Science and Technology, Daejeon, Korea

O. Hyun Baek, Jae Ho Moon

Samsung Electronics Company, Ltd.

Paper No. IMECE2002-33315, pp. 225-228; 4 pages
doi:10.1115/IMECE2002-33315
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

In this paper, we present the design, fabrication and testing of an electromagnetic squeezing microactuator, which generates a laterally-driven squeezing motion for application to the microinjectors. A set of electroplated flexible copper microstrip pairs is fabricated by using the thick PR micromold. In the experimental study, we measured the static response of the electromagnetic squeezing microactuators as well as the dynamic response in the vacuum, air and water environments. We also measured the pumping volume of the present electromagnetic squeezing microactuators as 20pl/cycle for DI water.

Copyright © 2002 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In