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Predicting the Performance of a Bistable Micro Mechanism Using Design-Stage Uncertainty Analysis

[+] Author Affiliations
Jonathan W. Wittwer, Larry L. Howell, Sydney M. Wait, Michael S. Cherry

Brigham Young University, Provo, UT

Paper No. IMECE2002-33262, pp. 127-134; 8 pages
doi:10.1115/IMECE2002-33262
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

Significant reduction in cost and time to market can be realized by implementing design-stage uncertainty analysis to predict whether a device will meet specified requirements. This paper demonstrates a generalized uncertainty analysis method appropriate for surface micromachined devices and uses a micro linear-displacement bistable mechanism as an example. Dimensional variations, joint clearances, material property uncertainty and friction are included as sources of error. Using matrix notation, the model consists of a system of implicit, nonlinear equations. The analysis is performed at multiple deflections to estimate uncertainty bands around the force-deflection curve of the mechanism. These results can then be used to predict the performance of the mechanism. Applying these techniques resulted in a functional first-time prototype of a bistable mechanism that can be actuated using a non-amplified thermal actuator.

Copyright © 2002 by ASME

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