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Nonlinear Dynamic Study of a Bistable MEMS Beam Toggled by Optical Actuation

[+] Author Affiliations
Marc Sulfridge, Taher Saif, Norman Miller

University of Illinois at Urbana-Champaign, Urbana, IL

Paper No. IMECE2002-33260, pp. 117-120; 4 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


In (Sulfridge, et al., 2001) we presented an actuation scheme for toggling a bistable MEMS from one stable state to the other using the radiation pressure of light. The experiments on radiation pressure revealed some unexpected behavior of the beam when toggled by short duration laser pulses. While long duration laser pulses reliably toggled the beam every time, short duration pulses only seemed to toggle the beam about half of the time. This paper presents a new, nonlinear dynamic analysis of the bistable beam device used in those experiments that explains this anomalous behavior.

Copyright © 2002 by ASME



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