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Thermal, Electrical, and Thermoelectric Measurements by Scanning Probe Microscopy

[+] Author Affiliations
Andrew C. Miner

Nanocoolers, Inc., Austin, TX

Michael Chapp, Deyu Li, Arun Majumdar

University of California at Berkeley, Berkeley, CA

Paper No. IMECE2002-33289, pp. 95-102; 8 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


This work brings together aspects of scanning thermal microscopy (SThM) and scanning spreading resistance microscopy (SRM) into a single tool for thermoelectric measurement. The measurement tool presented here allows simultaneous electrical and thermal measurement of samples using a probe tip of radius on the order of 50 nm. Thermal and mechanical design allow topographic resolution on the order of 4Å while minimizing detrimental heat flow from the probe to sample. This tool integrates sensors allowing for heat flux measurement and control, enabling a variety of thermal, electrical and thermoelectric measurements. Preliminary thermal and electrical measurements of bismuth telluride nanowire arrays demonstrate the capabilities of this scanning probe design.

Copyright © 2002 by ASME



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