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Integration of Single Multi-Walled Carbon Nanotube on Micro Systems

[+] Author Affiliations
Jaehyun Chung, Junghoon Lee, Rodney S. Ruoff, Wing Kam Liu

Northwestern University, Evanston, IL

Paper No. IMECE2002-33325, pp. 77-81; 5 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


This paper presents new techniques for depositing single multi-walled carbon nanotube (MWCNT) on metal electrodes based on micro-fabrication and an electric-field-guided assembly technique. It was demonstrated that a single MWCNT can be directionally deposited across a microscale gap guided by a biased AC electric field. The biased AC method could effectively avoid the deposition of undesirable particles, and yet maintained highly ordered deposition results. A specific AC frequency component was applied to attract only desired CNTs into a gap and a DC component was used to diminish electric field significantly when the first CNT is deposited. This method can be easily combined with other micromachining process and possibly applied to batch production.

Copyright © 2002 by ASME



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