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FEA Modeling of Piezoelectric Clamped-Clamped Beam Microresonators

[+] Author Affiliations
Luke J. Currano, Brett Piekarski

U.S. Army Research Laboratory, Adelphi, MD

Donald L. DeVoe

University of Maryland, College Park, MD

Paper No. IMECE2002-33324, pp. 71-76; 6 pages
doi:10.1115/IMECE2002-33324
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

Finite element modeling of MEMS piezoelectric clamped-clamped beam resonators is investigated using a design matrix consisting of beams of varying length and film thickness. Laser Doppler vibrometry was performed on fabricated devices to obtain frequency response, modeshapes, and deflection magnitudes at resonance. The mechanical testing showed an unexpected nonlinearity at resonance in both the frequency response and the modeshapes. Finite element analysis of the beams is presented and the results compared to test data. The model is shown to predict natural frequency well, but the nonlinear modeshapes prevent the accurate prediction of displacement magnitude and modeshape. Evidence is offered from both testing and a finite element buckling model suggesting that the nonlinearity is due to piezoelectrically-induced buckling in the beams.

Copyright © 2002 by ASME

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