Full Content is available to subscribers

Subscribe/Learn More  >

FEA Modeling of Piezoelectric Clamped-Clamped Beam Microresonators

[+] Author Affiliations
Luke J. Currano, Brett Piekarski

U.S. Army Research Laboratory, Adelphi, MD

Donald L. DeVoe

University of Maryland, College Park, MD

Paper No. IMECE2002-33324, pp. 71-76; 6 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


Finite element modeling of MEMS piezoelectric clamped-clamped beam resonators is investigated using a design matrix consisting of beams of varying length and film thickness. Laser Doppler vibrometry was performed on fabricated devices to obtain frequency response, modeshapes, and deflection magnitudes at resonance. The mechanical testing showed an unexpected nonlinearity at resonance in both the frequency response and the modeshapes. Finite element analysis of the beams is presented and the results compared to test data. The model is shown to predict natural frequency well, but the nonlinear modeshapes prevent the accurate prediction of displacement magnitude and modeshape. Evidence is offered from both testing and a finite element buckling model suggesting that the nonlinearity is due to piezoelectrically-induced buckling in the beams.

Copyright © 2002 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In