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Study on Fabrication of Microrods by Cutting Process

[+] Author Affiliations
Masahiko Jin, Masao Murakawa

Nippon Institute of Technology, Saitama, Japan

Takumi Kohinata

NS-Tool Company, Ltd., Miyagi, Japan

Paper No. IMECE2002-33281, pp. 33-37; 5 pages
doi:10.1115/IMECE2002-33281
From:
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Microelectromechanical Systems
  • ISBN: 0-7918-3642-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME

abstract

In this study, we examine an efficient method for fabricating microrods with high accuracy, using a cutting process. Two problems exist in the fabrication of microrods using the cutting process. The first problem is low processing accuracy due to microrod deflection resulting from the cutting force acting during the process and microrod breakage at the end of the process. The second problem is deterioration of the cut surface due to low cutting speed resulting from the small diameter of the microrod. We propose the following methods to solve these problems. For the first problem, we propose a cutting method that uses a cutting-tool path and cutting sequence to achieve a minimum cutting force acting on the microrod during the process. For the second problem, we propose a cutting method that uses ultrasonic vibration to decrease the cutting force, thereby realizing good cutting surfaces under the low-cutting-speed condition. As a result, we succeeded in the fabrication of a linear microrod with a 50 μm diameter and an aspect ratio of 100, as well as a microrod for a friction wheel with a complex stepped shape of 70 μm minimum diameter. Thus, we demonstrated the effectiveness of the proposed cutting method for microrods.

Copyright © 2002 by ASME

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