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Quasi-Steady State Natural Convection in Laser Chemical Vapor Deposition With a Moving Laser Beam

[+] Author Affiliations
Yuwen Zhang

New Mexico State University, Las Cruces, NM

Paper No. IMECE2002-33084, pp. 33-44; 12 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Heat Transfer, Volume 5
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Heat Transfer Division
  • ISBN: 0-7918-3636-3 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


Numerical analysis of laser chemical vapor deposition (LCVD) of Titanium Nitride by a moving laser beam is investigated numerically. The effect of natural convection due to temperature and concentration differences in the gases mixture is modeled and implemented into the thermal model of LCVD by a moving laser beam. The problem is formulated in the coordinate system that moves with the laser beam. The results show that the effect of natural convection on the shape of deposited film is very insignificant for cases with lower laser power but it becomes important when the laser power is increased.

Copyright © 2002 by ASME



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