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Nanoscale Measurements of Coupled Mechanical Electrical and Thermal Properties Using a Novel Characterization Tool

[+] Author Affiliations
Utkarsha Singh, Alexis Abramson, Vikas Prakash

Case Western Reserve University

Paper No. IMECE2005-82861, pp. 591-598; 8 pages
doi:10.1115/IMECE2005-82861
From:
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4217-7 | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME

abstract

This paper presents the design and development of a nano-mechanical, electrical and thermal (NMET) characterization tool for coupled measurements of one-dimensional nanostructures. The device is designed to operate inside an environmental scanning electron microscope (ESEM) to facilitate in-situ imaging, positioning and testing. The design includes a custom nanomanipulator system, which assists in controlled placement of individual one-dimensional nanostructures (specimens) between two probes. Sample straining and unique direct force and displacement measurements are achieved by the use of a commercially available actuator. The “next generation” tool is also discussed.

Copyright © 2005 by ASME

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