Full Content is available to subscribers

Subscribe/Learn More  >

The Effects of Process Parameters on Carbon Nanotube Synthesis by Plasma Enhanced Chemical Vapor Deposition (PECVD)

[+] Author Affiliations
Sungwon S. Kim, Timothy S. Fisher

Purdue University

Paper No. IMECE2005-81431, pp. 575-580; 6 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4217-7 | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


Plasma-enhanced chemical vapor deposition (PECVD) offers a variety of advantages in the synthesis of carbon nanotubes in that several critical synthesis parameters can be controlled independently. In the present study, the effects of reacting gas composition, catalyst film thickness and bias voltage are investigated. Carbon nanotube samples are grown in a microwave PECVD chamber on clean silicon substrates. Gas composition is varied from carbon-rich to carbon-lean by controlling the methane flow rate. The results indicate that gas-phase composition profoundly affects the synthesized material, which is shown to be randomly oriented nanotube mats for moderate-to-rich gas mixtures and non-tubular carbon for very lean mixtures. The non-tubular content is shown to contain disordered and graphitic bonding by Raman spectrometry. Vertically aligned nanostructures are obtained under the presence of bias voltage.

Copyright © 2005 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In