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Polymer Tube Embedded In-Plane Micropump: Design, Analysis and Fabrication

[+] Author Affiliations
Ashutosh Kole, Jeongsik Sin, Woo Ho Lee, Danq Popaq, Dereje Agonafer, Harry E. Stephanou

University of Texas at Arlington

Paper No. IMECE2005-83172, pp. 407-413; 7 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4217-7 | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


This paper presents the design, analysis, and fabrication of a novel polymer tube embedded in-plane micropump. The key component of the proposed micropump is a Parylene polymer tube that is embedded into a silicon micromachined actuation structure. The advantages of embedding a Parylene polymer tube are biocompatibility, leakage free flow, and insulation from electrical and thermal contacts. The tube works as a diaphragm, which transfers the pumping motion from the silicon electrothermal actuators to fluid. In order to guide the design of the pump, FEM simulation was performed for structural analysis on Parylene tube and evaluation of the electrothermal actuator. Parylene was conformally deposited on the nickel coated DRIE processed silicon mold, and peeled off and two Parylene layers were bonded together to form a tube. The maximum deflection achieved from the Parylene diaphragm is 5.4μm and the computed flow rate of the pump is 160nl/min.

Copyright © 2005 by ASME



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