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Robust Time-Optimal Command Shaping for Piezoelectric Actuators: STM Application

[+] Author Affiliations
Y. Xu, P. H. Meckl

Purdue University

Paper No. IMECE2005-82037, pp. 1343-1348; 6 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Dynamic Systems and Control, Parts A and B
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 0-7918-4216-9 | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


A scanning tunneling microscope (STM) uses a piezoelectric actuator to perform constant-velocity scanning motion. Many feedback strategies have been proposed, but their achievable scan rate is substantially limited by the turnaround transients in the scan path. Therefore, a robust time-optimal command shaping technique with an iterative search procedure is introduced in this paper to improve the scan speed of piezoactuators, and is applicable to a general class of systems without rigid-body mode. Furthermore, a time-energy-optimal formulation is presented to reduce the in-maneuver oscillation. The hysteresis nonlinearity of piezoactuators is compensated using the proposed continuous numerical inversion algorithm. Finally, the closed-loop simulation shows the performance robustness in the presence of hysteresis cancellation error and natural frequency perturbation.

Copyright © 2005 by ASME



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