0

Full Content is available to subscribers

Subscribe/Learn More  >

Multi-Axis Maglev Positioner With High Resolution Over Large Travel Range

[+] Author Affiliations
Won-Jong Kim, Shobhit Verma

Texas A&M University

Paper No. IMECE2005-80050, pp. 1295-1305; 11 pages
doi:10.1115/IMECE2005-80050
From:
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Dynamic Systems and Control, Parts A and B
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 0-7918-4216-9 | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME

abstract

This paper presents a novel multi-axis positioner that operates on the magnetic-levitation (maglev) principle. This maglev stage is capable of positioning at the resolution of a few nanometers over a planar travel range of several millimeters. A novel actuation scheme was developed for the compact design of this stage that enables 6-axis force generation with just 3 permanent magnets. We calculated the forces with electromagnetic analysis over the whole travel range and experimentally verified them with a unit actuator. The single moving part, namely the platen, is modeled as a pure mass due to the negligible effect of magnetic spring and damping. There are 3 laser interferometers and 3 capacitance sensors to sense the 6-axis position/rotation of the platen. A lead-lag compensator was designed and implemented to control each axis. A nonlinear model of the force was developed by electromagnetic analysis, and feedback linearization was applied to cancel the nonlinearity of the actuators over the large travel range. Various experiments were conducted to test positioning, loading, and vibration-isolation capabilities. This maglev stage has a moving mass of 0.267 kg. Its position resolution is 4 nm over a travel range of 5 × 5 mm in the x-y plane. It can carry and precisely position an additional payload of 2 kg. Its potential applications include semiconductor manufacturing, micro-fabrication and assembly, nanoscale profiling, and nano-indentation.

Copyright © 2005 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In